Using GLV (Grating Light Valve) technology, high speed parallel direct writing of laser beam up to 1000 unit pixels can be achieved.
Build an independent design library, which can complete the highest degree of freedom of 3D lithography, and support standard image source, personalized 3D design source.
The solution of maskless Laser direct writing system with larger format can be customized.
When the gray writing function is turned off, the direct writing speed will be increased by 2 times for the same exposure area.
Under the direct writing accuracy of 0.5 μm, it only takes 28 hours for 0.5m x 0.5m gray-scale lithography.
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