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              PRODUCT
              

            
              

        
              

        
              

    
              


              


              

    
              

        

        
              

            

        
              

    
              


              






              

    
              

        
              Available Systems
        
              

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              Product Introduction
              
            

        
              

        
              
            ASML’s PAS 5000/50 stepper with a well proven Zeiss 0.48NA i-line lens with a 21.1mm image field diameter.
            The PAS 5000/50 stepper has been designed for 0.5micron production resolutions using a “process in-depended” alignment system, for a superior production overlay.
            Systems is available as fully refurbished.
        
              

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              Key features of the ASML PAS5000/50A i-line wafer stepper:

            
              
        
              
        
              
            
                
                
              • Lens resolution				0.5 micron  i-line (365nm)
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              • Reduction				5X
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              • Field size				21.2 mm dia ( Xmax= 15mm, Ymax= 19mm )
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              • UDOF					1.2 micron ( Slope > 83 degrees )
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              • Uniformity				± 2.5%
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              • Intensity				280 mW/c㎡
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              • Reticles					6 (5”), automatic exchange and masking
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              • Wafers					100, 125, 150 mm
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                +86 21 67693080
                

                
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                sales@simaxat.com
                

                
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            Simax Shanghai Company Limited
              

            ADDRESS：No.255, SizhuanNan Road, Building 130, 
              Songjiang district,Shanghai,China.201612.
        
              

        
              

            

        
              

        
              

            
              

            
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              ALL RIGHTS RESERVED ?2021 Simax Shanghai Company Limited 滬ICP備18039044號-1
              

            
               滬公網安備 31011702008159號
              

        
              

    
              


              


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