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              CH / EN

              PRODUCT

              Spare Parts

              BACK

              Product Introduction

              Spare Parts
              Located in Hong Kong and Singapore
              Large selection of ASML mature products parts
              check the spare parts list

              Please fill in your information

              We will send the product manual to your mailbox

              (The information you submit will be strictly confidential)

              Submit application successfully

              We will send the product brochure to your email address

              OPM new parts

              • OPM optics: improve intensity and CD uniformity

                For DUV (include PAS and AT system)
                Lens A,B,C, bending point mirror, entrance window
                For I-line
                Interference filter; UV-WG filter
              • New SWS flexcable for scanner (phase 2 and phase 3)

              • New wafer table clean tool

              • Stepper / aligner wafer table

              • TEL

                +86 21 67693080

              • E-MAIL

                sales@simaxat.com

              Simax Shanghai Company Limited
              ADDRESS:No.255, SizhuanNan Road, Building 130,
              Songjiang district,Shanghai,China.201612.
              WeChat

              ALL RIGHTS RESERVED ?2021 Simax Shanghai Company Limited 滬ICP備18039044號-1

              滬公網安備 31011702008159號

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