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            CH
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              PRODUCT
              

            
              

        
              

        
              

    
              


              


              

    
              

        

        
              

            

        
              

    
              


              






              

    
              

        
              Spare Parts


              

        BACK

    
              

    
              

        

        
              

            

            

        
              

    
              

    
              

        
              

            

            
              Product Introduction
              

        
              

        
              

          Spare Parts

              
Located in Hong Kong and Singapore

              
Large selection of ASML mature products parts

              



        
              



        check the spare parts list

    
              


              


              

    
              

        

        
              

            
              Please fill in your information
              

            
              We will send the product manual to your mailbox
              

        
              

        
              

            
                

                
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              (The information you submit will be strictly confidential)
              

    
              


              







              
    
              
        
        
              
        
              
            
              Submit application successfully
              
            
              We will send the product brochure to your email address
              
        
              
        
              
            
              
            
              
        
              
    
              

              






              
    
              
        
              
            
            
              OPM new parts
 
              

        
              
        
              
            
                
               
              •  
                    
                
                    
                OPM optics: improve intensity and CD uniformity
                
                    
                
                        
                
                        
                For DUV (include PAS and AT system)
                
                        
                Lens A,B,C, bending point mirror, entrance window
                
                        
                For I-line
                
                        
                Interference filter; UV-WG filter
                
                    
                
                    
                
                    

               
                • 
                
                
              • 
                    
                
                    
                New SWS flexcable for scanner (phase 2 and phase 3)


                
                
                • 
                 
              • 
                    
                
                    
                New wafer table clean tool 



                
                
                • 
                
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                Stepper / aligner wafer table



                
                
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              • 

                    
                

                    
                TEL
                

                    
                +86 21 67693080
                

                
                • 

                
              • 

                    
                

                    
                E-MAIL
                

                    
                sales@simaxat.com
                

                
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            Simax Shanghai Company Limited
              

            ADDRESS：No.255, SizhuanNan Road, Building 130, 
              Songjiang district,Shanghai,China.201612.
        
              

        
              

            

        
              

        
              

            
              

            
              WeChat
              

        
              

        
              

            
              ALL RIGHTS RESERVED ?2021 Simax Shanghai Company Limited 滬ICP備18039044號-1
              

            
               滬公網安備 31011702008159號
              

        
              

    
              


              


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