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              CH / EN

              PRODUCT

              Available Systems

              BACK

              Product Introduction

              ASML’s PAS5000/55A, i-line wafer stepper with a 0.48NA Zeiss lens, has been the production tool for many leading 4, 5 and 6” fabs around the world for the past four decades.
              The system has a “process in-depended” alignment system, for a superior production overlay. The small footprint of roughly 1m2 makes flexible placing in most existing fabs possible.
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              Key features of the ASML PAS5000/55A i-line wafer stepper:

              • 15x15mm, 0.48NA water cooled Zeiss lens

              • Handles 4,5- or 6-inch wafers, operator changeable

              • 5-inch reticle handling

              • Direct reticle referenced, through the lens alignment system, zero-layer alignment

              • Process in-depended phase grating alignment system

              • High speed air baring wafer stage

              • Small footprint

              OTHER SPECIFICATIONS

              • TEL

                +86 21 67693080

              • E-MAIL

                sales@simaxat.com

              Simax Shanghai Company Limited
              ADDRESS:No.255, SizhuanNan Road, Building 130,
              Songjiang district,Shanghai,China.201612.
              WeChat

              ALL RIGHTS RESERVED ?2021 Simax Shanghai Company Limited 滬ICP備18039044號-1

              滬公網安備 31011702008159號

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